Abstract:In order to improve the stealth performance of the cockpit glass and optimize the the cockpit’s photoelectric performance parameters, for the Nb-Doped ITO (Indium Tin Oxides) coating of the aircraft cockpit glasses, this paper mainly studied the Nb-Doped ITO coating performance parameters’ influence rule of the technological parameters such as the number of sputtering targets and oxygen flow. The experiment results show that, with the number of targets involved in sputtering increases, the sheet resistance first decreases rapidly, then the falling slope becomes small, and at last tends to constant value; the transmittance changes oscillatorily, and when the sheet resistance is stable, the transmittance gradually becomes smaller; as the oxygen flow increases, the sheet resistance decreases at first, and then increases, when the flow is greater than 6 sccm, the sheet resistance increases rapidly, and the transmittance decreases after oscillation. The sheet resistance and transmittance of the Nb-Doped ITO films with different substrates don’t change great, and the different substrates just affect the degree of vacuum and other process. The technological parameters also have certain effects on the film color.